JPS6399601U - - Google Patents
Info
- Publication number
- JPS6399601U JPS6399601U JP19240386U JP19240386U JPS6399601U JP S6399601 U JPS6399601 U JP S6399601U JP 19240386 U JP19240386 U JP 19240386U JP 19240386 U JP19240386 U JP 19240386U JP S6399601 U JPS6399601 U JP S6399601U
- Authority
- JP
- Japan
- Prior art keywords
- xenon lamp
- mirror
- fixed
- frame
- socket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052724 xenon Inorganic materials 0.000 claims description 6
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 6
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19240386U JPH0140082Y2 (en]) | 1986-12-16 | 1986-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19240386U JPH0140082Y2 (en]) | 1986-12-16 | 1986-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6399601U true JPS6399601U (en]) | 1988-06-28 |
| JPH0140082Y2 JPH0140082Y2 (en]) | 1989-12-01 |
Family
ID=31147450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19240386U Expired JPH0140082Y2 (en]) | 1986-12-16 | 1986-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0140082Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010015028A (ja) * | 2008-07-04 | 2010-01-21 | Hitachi High-Technologies Corp | 露光装置及び露光装置のランプ交換方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020144532A (ja) | 2019-03-05 | 2020-09-10 | アズビル株式会社 | 料金シミュレーション装置及び料金シミュレーション方法 |
-
1986
- 1986-12-16 JP JP19240386U patent/JPH0140082Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010015028A (ja) * | 2008-07-04 | 2010-01-21 | Hitachi High-Technologies Corp | 露光装置及び露光装置のランプ交換方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0140082Y2 (en]) | 1989-12-01 |